PACS 07.07.D, 42.79.P,Q Optoelectronic sensor of longitudinal and angular displacements A. Dlugaszek, J. Jabczynski, J. Janucki, W. Skrzeczanowski Semiconductor Physics, Quantum Electronics and Optoelectronics - 1999. - 2, ¹3. - P.71-73. - Engl. Il.: 6. Ref.: 5. Abstract. In the sensor a triangulation method of displacement measurement has been used. A method of sensor calibration using interferometric distance measurements has been elaborated. Linearity and resolution investigations have been performed for different parameter sets of sensor transmitting-receiving head. An accuracy of displacement measurements depends on parameters of a beam illuminating a surface being displaced, parameters of a position sensitive detector and on a signal-to-noise ratio of a signal analog processing block. Results of investigations of uncertainties of lathe slide shifts are also presented. Keywords: optoelectronic sensor, position-sensitive detector, longitudial displacement, angular displacement [Contents] |